Tanguy Leveder
at LETI
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 3 May 2007 Paper
Proc. SPIE. 6533, 23rd European Mask and Lithography Conference
KEYWORDS: Lithography, Molecular bridges, Etching, Polymers, Capillaries, Printing, Bridges, Nanoimprint lithography, Photoresist processing, Semiconducting wafers

Proceedings Article | 5 April 2007 Paper
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Metrology, Polarization, Visualization, Databases, Atomic force microscopy, Data acquisition, Scatterometry, Inverse problems, Process control, Critical dimension metrology

Proceedings Article | 15 March 2007 Paper
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Lithography, Optical lithography, Polymers, Glasses, Annealing, Heat treatments, Printing, Nanoimprint lithography, Semiconducting wafers, Temperature metrology

Proceedings Article | 24 March 2006 Paper
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Electron beam lithography, Polymers, Silicon, Scanning electron microscopy, Printing, Bridges, Nanoimprint lithography, Critical dimension metrology, Semiconducting wafers, Polymer thin films

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