Dr. Tantan Zhang
at A*STAR Institute of Microelectronics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 March 2021 Presentation + Paper
Proceedings Volume 11697, 116970N (2021) https://doi.org/10.1117/12.2582707
KEYWORDS: Infrared sensors, Infrared radiation, Absorption, Thin films, Sensors, Pyroelectric detectors, Infrared detectors, Aluminum nitride, Microelectromechanical systems, Thermography

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