Tao Huang
at Huazhong Univ of Science and Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 3 February 2009
Proc. SPIE. 7160, 2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications
KEYWORDS: Light sources, Edge detection, Optical lithography, Detection and tracking algorithms, Calibration, Image processing, Charge-coupled devices, Semiconducting wafers, Halogens, Light

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