Prof. Tao Tao Profile

Prof. Tao Tao

at Xi'an Jiaotong Univ

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Publications (1)

Proceedings Article | 30 August 2019 Paper

Heat accumulation effect existing in silicon substrate by femtosecond laser irradiation on antireflection performance

Tong Chen, Wenjun Wang, Tao Tao, Xuesong Mei, Aifei Pan

Proceedings Volume 11101, 111010C (2019) https://doi.org/10.1117/12.2528299

KEYWORDS: Silicon, Antireflective coatings, Thermal effects, Femtosecond phenomena, Laser processing, Reflectivity, Laser irradiation, Semiconducting wafers, Reflection

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