Dr. Tao Xu
at Kulicke & Soffa Industries
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 8 September 2010
Proc. SPIE. 7771, Thin Film Solar Technology II
KEYWORDS: Thin films, Glasses, Solar cells, Reliability, Resistance, Ultrasonics, Aluminum, Molybdenum, Selenium, Copper indium gallium selenide

Proceedings Article | 21 November 2001
Proc. SPIE. 4592, Device and Process Technologies for MEMS and Microelectronics II
KEYWORDS: Microelectromechanical systems, Optical lithography, Etching, Sputter deposition, Dry etching, Scanning electron microscopy, Photoresist materials, Reactive ion etching, Zinc oxide, Photomicroscopy

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