Mr. Taoufik El Mastouli
at Univ Paul Sabatier
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 26, 2008
Proc. SPIE. 6882, Micromachining and Microfabrication Process Technology XIII
KEYWORDS: Copper, Silicon, Resistance, Magnetism, Photoresist materials, Micromachining, Electroplating, Prototyping, Inductance, Chemical mechanical planarization

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