Prof. Tapio K. Niemi
Professor at Tampere Univ of Technology
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | March 22, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Plasmonics, Nanostructures, Electron beam lithography, MATLAB, Optical lithography, Etching, Glasses, Silicon, Scanning electron microscopy, Optoelectronics, Beam shaping, Chemical elements, Nanofabrication, Nanolithography

PROCEEDINGS ARTICLE | May 11, 2012
Proc. SPIE. 8432, Semiconductor Lasers and Laser Dynamics V
KEYWORDS: Semiconductors, Quantum wells, Waveguides, Cladding, Etching, Coating, Gallium antimonide, Semiconductor lasers, Nanoimprint lithography, Nanolithography

PROCEEDINGS ARTICLE | March 22, 2011
Proc. SPIE. 7822, Laser Optics 2010
KEYWORDS: Semiconductors, Cladding, Etching, Laser processing, Laser development, Gallium antimonide, Plasma etching, Laser damage threshold, Nanoimprint lithography, Nanolithography

SPIE Journal Paper | July 1, 2009
JM3 Vol. 8 Issue 03
KEYWORDS: Semiconducting wafers, Nanoimprint lithography, Waveguides, Etching, Semiconductor lasers, Lithography, Particles, Photomasks, Nanostructures, Electron beam lithography

PROCEEDINGS ARTICLE | March 18, 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Lithography, Nanostructures, Electron beam lithography, Waveguides, Etching, Particles, Semiconductor lasers, Photomasks, Nanoimprint lithography, Semiconducting wafers

PROCEEDINGS ARTICLE | August 26, 2008
Proc. SPIE. 7032, Plasmonics: Metallic Nanostructures and Their Optical Properties VI
KEYWORDS: Gold, Plasmons, Nanostructures, Mirrors, Second-harmonic generation, Polarization, Metals, Particles, Nonlinear response, Dielectric polarization

Showing 5 of 8 publications
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