Dr. Taro Itatani
Senior Researcher at AIST
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | September 26, 2007
Proc. SPIE. 6772, Terahertz Physics, Devices, and Systems II
KEYWORDS: Diffraction, Millimeter wave imaging, Real time imaging, Super resolution, Polarization, Electrodes, Crystals, Terahertz radiation, Antennas, Picosecond phenomena

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Etching, Dry etching, Gallium arsenide, Silicon, Resistance, Photoresist materials, Photomasks, Reactive ion etching, Chlorine

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Optical fibers, Refractive index, Waveguides, Dispersion, Nitrogen, Coating, Single mode fibers, Scanning electron microscopy, Dendrimers, Absorption

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Nanostructures, Electron beam lithography, Optical lithography, Water, Dielectrics, Scanning electron microscopy, Photoresist materials, Microelectronics, Photoresist processing

PROCEEDINGS ARTICLE | February 17, 2003
Proc. SPIE. 4833, Applications of Photonic Technology 5
KEYWORDS: Ultrafast phenomena, Titanium, Switches, Femtosecond phenomena, Waveguides, Dielectrics, Gallium arsenide, Capacitance, Signal processing, Electro optics

PROCEEDINGS ARTICLE | August 24, 2001
Proc. SPIE. 4345, Advances in Resist Technology and Processing XVIII
KEYWORDS: Lithography, Capacitors, Etching, Dielectrics, Silicon, Heat treatments, Silicon films, Capacitance, Photomasks, Semiconducting wafers

Showing 5 of 9 publications
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