Ms. Tatiana Kazieva Profile

Tatiana Kazieva

at National Research Nuclear Univ MEPhI

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Publications (2)

Proceedings Article | 21 October 2015 Paper

SPM metrological assurance using a heterodyne interferometer

T. Kazieva, A. Kuznetsov, K. Gubskiy, V. Reshetov, M. Ponarina, A. Antonov, A. Useinov

Proceedings Volume 9636, 96360R (2015) https://doi.org/10.1117/12.2199874

KEYWORDS: Interferometers, Heterodyning, Scanning probe microscopy, Metrology, Bragg cells, Signal detection, Microscopes, Refractive index, Interference (communication), Beam splitters

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Proceedings Article | 7 January 2015 Paper

Three-coordinate laser heterodyne interferometer for metrological assurance of scanning probe microscopes

Tatiana Kazieva, Andrey Kuznetsov, Konstantin Gubskiy, Vladimir Reshetov

Proceedings Volume 9442, 94420K (2015) https://doi.org/10.1117/12.2086921

KEYWORDS: Interferometers, Heterodyning, Metrology, Laser development, Signal to noise ratio, Scanning probe microscopes, Scanning probe microscopy, Mirrors, Scanning electron microscopy, Calibration

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