Three-coordinate laser interferometer was designed to enable metrological measurements using conventional scanning probe microscopes. This article presents the results of the errors sources investigation in three-coordinate laser interferometer, describes the features of the optical scheme and data processing system that ensure sub-nanometer accuracy of the measurements.
In this article we present the developed three-coordinate laser heterodyne interferometer that can be integrated in the commercially available industrial scanning probe and electron microscopes. It allows one to ensure traceability of measurements in nanometer range to the primary standard of meter. As outcome, the regular calibration of scanners becomes unnecessary, while the reproducibility and accuracy of the measurements dramatically increases.