Mrs. Tatiana Y. Levin
Litography Process Staff Engineer at Intel Electronics Ltd
Area of Expertise:
Lithography , Overlay , APC
Publications (2)

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Lithography, Metrology, Scanners, Scanning electron microscopy, Scatterometry, Process control, Critical dimension metrology, Semiconducting wafers, Scatter measurement, Overlay metrology

PROCEEDINGS ARTICLE | May 17, 2005
Proc. SPIE. 5755, Data Analysis and Modeling for Process Control II
KEYWORDS: Lithium, Statistical analysis, Data modeling, Error analysis, Computer simulations, Time metrology, Process control, Software development, Information operations, Data analysis

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