Dr. Tatsuhiko Higashiki
Senior Fellow
SPIE Involvement:
Conference Program Committee | Author
Publications (22)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Semiconductors, Lithography, Optical lithography, Etching, Semiconductor materials, Particle filters, Photomasks, Extreme ultraviolet lithography, High volume manufacturing, Nanoimprint lithography

PROCEEDINGS ARTICLE | April 2, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Semiconductors, Nanotechnology, Lithography, Defect detection, Ultraviolet radiation, Inspection, Optical inspection, Organic materials, Optical resolution, Semiconducting wafers

SPIE Journal Paper | October 1, 2011
JM3 Vol. 10 Issue 04
KEYWORDS: Nanoimprint lithography, Photomasks, Semiconductors, Lithography, Semiconducting wafers, Electron beam lithography, Optical lithography, Extreme ultraviolet lithography, Overlay metrology, Electron beams

PROCEEDINGS ARTICLE | March 17, 2011
Proc. SPIE. 7970, Alternative Lithographic Technologies III
KEYWORDS: Semiconductors, Lithography, Optical lithography, Ultraviolet radiation, Photomasks, Extreme ultraviolet lithography, Nanoimprint lithography, Critical dimension metrology, Semiconducting wafers, Defect inspection

SPIE Journal Paper | April 1, 2010
JM3 Vol. 9 Issue 02
KEYWORDS: Diffraction, Tolerancing, Critical dimension metrology, Design for manufacturability, Manufacturing, Error analysis, Extreme ultraviolet lithography, Polarization, Extreme ultraviolet, Lithography

PROCEEDINGS ARTICLE | May 11, 2009
Proc. SPIE. 7379, Photomask and Next-Generation Lithography Mask Technology XVI
KEYWORDS: Lithography, Diffraction, Lithographic illumination, Polarization, Manufacturing, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Critical dimension metrology, Tolerancing

Showing 5 of 22 publications
Conference Committee Involvement (16)
Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2019
25 February 2019 | San Jose, California, United States
Novel Patterning Technologies 2018
26 February 2018 | San Jose, California, United States
Emerging Patterning Technologies 2017
27 February 2017 | San Jose, California, United States
Alternative Lithographic Technologies VIII
22 February 2016 | San Jose, California, United States
Alternative Lithographic Technologies VII
23 February 2015 | San Jose, California, United States
Showing 5 of 16 published special sections
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