Dr. Tatsuya Aota Profile

Dr. Tatsuya Aota

at Osaka Univ

SPIE Involvement:

Author

Publications (11)

Proceedings Article | 21 March 2008 Paper

Characterization of extreme ultraviolet emission from tin-droplets irradiated with Nd:YAG laser plasmas

Tatsuya Aota, Yuki Nakai, Shinsuke Fujioka, Etsuo Fujiwara, Masashi Shimomura, Hiroaki Nishimura, Nobukatsu Nishihara, Noriaki Miyanaga, Yasukazu Izawa, Kunioki Mima

Proceedings Volume 6921, 69212T (2008) https://doi.org/10.1117/12.771536

KEYWORDS: Extreme ultraviolet, Plasmas, Optical spheres, Nd:YAG lasers, Signal detection, Pulsed laser operation, Laser energy, Spherical lenses, Databases, Plasma generation

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Proceedings Article | 20 March 2008 Paper

Advanced laser-produced EUV light source for HVM with conversion efficiency of 5-7% and B-field mitigation of ions

K. Nishihara, A. Sunahara, A. Sasaki, S. Fujioka, Y. Shimada, M. Nunami, H. Tanuma, M. Murakami, T. Aota, K. Fujima, H. Furukawa, T. Nishikawa, F. Koike, R. More, T. Kato, V. Zhakhovskii, K. Gamata, H. Ueda, H. Nishimura, Y. Yuba, K. Nagai, N. Miyanaga, Y. Izawa, K. Mima

Proceedings Volume 6921, 69210Y (2008) https://doi.org/10.1117/12.769086

KEYWORDS: Ions, Tin, Pulsed laser operation, Plasma, Extreme ultraviolet, Carbon dioxide lasers, Sputter deposition, Magnetism, Light sources, Etching

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Proceedings Article | 24 March 2006 Paper

Energy spectra and charge state of debris emitted from laser-produced minimum mass tin plasmas

Shinsuke Fujioka, Hiroaki Nishimura, Tsuyoshi Ando, Nobuyoshi Ueda, Shinichi Namba, Tatsuya Aota, Masakatsu Murakami, Katsunobu Nishihara, Young-G. Kang, Atsushi Sunahara, Hiroyuki Furukawa, Yoshinori Shimada, Kazuhisa Hashimoto, Michiteru Yamaura, Yuzuri Yasuda, Keiji Nagai, Takayoshi Norimatsu, Noriaki Miyanaga, Yasukazu Izawa, Kunioki Mima

Proceedings Volume 6151, 61513V (2006) https://doi.org/10.1117/12.656071

KEYWORDS: Plasmas, Tin, Ions, Extreme ultraviolet, Pulsed laser operation, Mirrors, Chemical species, Light sources, Opacity, Extreme ultraviolet lithography

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Proceedings Article | 23 March 2006 Paper

Progress in LPP EUV source development at Osaka University

Noriaki Miyanaga, Hiroaki Nishimura, Shinsuke Fujioka, Tatsuya Aota, Shigeaki Uchida, Michiteru Yamaura, Yoshinori Shimada, Kazuhisa Hashimoto, Keiji Nagai, Takayoshi Norimatsu, Katsunobu Nishihara, Masakatsu Murakami, Vasilli Zhakhovskii, Young Kang, Atsushi Sunahara, Hiroyuki Furukawa, Akira Sasaki, Takeshi Nishikawa, Massahiro Nakatsuka, Hisanori Fujita, Koji Tsubakimoto, Hidetsugu Yoshida, Yasukazu Izawa, Kunioki Mima

Proceedings Volume 6151, 61511Q (2006) https://doi.org/10.1117/12.656555

KEYWORDS: Extreme ultraviolet, Tin, Plasma, Pulsed laser operation, Ions, Nd:YAG lasers, Laser development, YAG lasers, Absorption, Opacity

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Proceedings Article | 20 May 2004 Paper

EUV generation using water droplet target

Jing Quan Lin, Hidehiko Yashiro, Tatsuya Aota, Toshihisa Tomie

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.534708

KEYWORDS: Plasma, Extreme ultraviolet, YAG lasers, Extreme ultraviolet lithography, Pulsed laser operation, Signal detection, Diodes, Liquids, Semiconductor lasers, Laser stabilization

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Proceedings Article | 20 May 2004 Paper

Particle-cluster tin target for a high-conversion efficiency LPP source for EUVL

Toshihisa Tomie, Tatsuya Aota, Jing Quan Lin, Yoshifumi Ueno, Hidehiko Yashiro, Noriaki Kandaka, Hiroki Moriwaki, Gohta Niimi, Isao Matsushima, Kentaro Nishigori

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.535395

KEYWORDS: Plasma, Particles, Tin, Extreme ultraviolet, Plasma generation, Extreme ultraviolet lithography, Pulsed laser operation, Solids, Mirrors, Ions

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