Dr. Tatsuya Aota
at Osaka Univ
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 21 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Optical spheres, Databases, Laser energy, Plasmas, Nd:YAG lasers, Extreme ultraviolet, Plasma generation, Spherical lenses, Signal detection, Pulsed laser operation

Proceedings Article | 20 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Light sources, Etching, Sputter deposition, Ions, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Pulsed laser operation, Plasma, Tin

Proceedings Article | 24 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Mirrors, Light sources, Opacity, Chemical species, Ions, Plasmas, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Tin

Proceedings Article | 23 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Opacity, Ions, Laser development, Nd:YAG lasers, Extreme ultraviolet, YAG lasers, Pulsed laser operation, Plasma, Tin, Absorption

Proceedings Article | 20 May 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Semiconductor lasers, Laser stabilization, Diodes, Extreme ultraviolet, Extreme ultraviolet lithography, YAG lasers, Signal detection, Pulsed laser operation, Plasma, Liquids

Showing 5 of 11 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top