Te-Hsun Lin
at National Tsing Hua Univ
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Lithography, Optical lithography, Laser systems engineering, Vibrometry, Light sources, Laser development, Photoresist materials, Nanoimprint lithography, Semiconducting wafers, Sapphire

Proceedings Article | 28 March 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Optical lithography, Nanostructures, Optical choppers, Maskless lithography, Nanolithography, Vibration control, Electron beam lithography, Wavefronts, Scanning electron microscopy

Proceedings Article | 15 March 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Optical lithography, Laser sources, Diffraction gratings, Mirrors, Diffraction, Wavefronts, Electron beam lithography

Proceedings Article | 14 March 2016
Proc. SPIE. 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX
KEYWORDS: Microelectromechanical systems, Sensors, Lithography, Optical testing, Light sources, Mirrors, Laser systems engineering, System integration, Polarizers, Infrared sensors, Signal detection, Aluminum, Sensing systems

Proceedings Article | 4 March 2016
Proc. SPIE. 9736, Laser-based Micro- and Nanoprocessing X
KEYWORDS: Beam shaping, Lithography, Optical lithography, Maskless lithography, Thin films, Transmittance, Reflectivity, Reflection, Nanolithography, Nanostructures

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