Dr. Ted Liang
Principal Engineer at Intel Corp.
SPIE Involvement:
Conference Program Committee | Author
Publications (37)

Proceedings Article | 23 March 2020
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Defect detection, Deep ultraviolet, Inspection, Optical inspection, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, EUV optics

SPIE Journal Paper | 27 December 2017
JM3 Vol. 16 Issue 04
KEYWORDS: Extreme ultraviolet lithography, Photomasks, Extreme ultraviolet, Optical lithography, Pellicles, Inspection, Optical proximity correction, Free electron lasers, Printing, Scanners

Proceedings Article | 18 March 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Reticles, Optical lithography, Scanners, Inspection, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Yield improvement

Proceedings Article | 11 November 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Deep ultraviolet, Scanners, Particles, Inspection, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Defect inspection

Proceedings Article | 16 March 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Signal to noise ratio, Microscopes, Apodization, Phase contrast, Defect detection, Inspection, Interference (communication), Extreme ultraviolet, Phase shifts, Absorption

Showing 5 of 37 publications
Conference Committee Involvement (14)
Extreme Ultraviolet (EUV) Lithography XII
21 February 2021 | San Jose, California, United States
International Conference on Extreme Ultraviolet Lithography 2020
20 September 2020 | Monterey, California, United States
Extreme Ultraviolet (EUV) Lithography XI
24 February 2020 | San Jose, California, United States
International Conference on Extreme Ultraviolet Lithography 2019
16 September 2019 | Monterey, California, United States
Extreme Ultraviolet (EUV) Lithography X
25 February 2019 | San Jose, California, United States
Showing 5 of 14 Conference Committees
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