Tejaswi K. Indukuri
Graduate Student Researcher at Intel Corp
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9054, Advanced Etch Technology for Nanopatterning III
KEYWORDS: Lithography, Optical lithography, Etching, Metals, Copper, Dielectrics, Chemistry, Process control, Critical dimension metrology, Plasma

PROCEEDINGS ARTICLE | April 20, 2006
Proc. SPIE. 6183, Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits
KEYWORDS: Oxides, Photonic devices, Electronics, Resonators, Waveguides, Silicon, Oxygen, Integrated optics, Transistors, Semiconducting wafers

PROCEEDINGS ARTICLE | March 3, 2006
Proc. SPIE. 6124, Optoelectronic Integrated Circuits VIII
KEYWORDS: Optical filters, Electronics, Microresonators, Resonators, Waveguides, Silicon, Photonics, Integrated optics, Transistors, Semiconducting wafers

PROCEEDINGS ARTICLE | August 27, 2005
Proc. SPIE. 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II
KEYWORDS: Optical filters, Optical amplifiers, Resonators, Waveguides, Silicon, Kerr effect, Raman scattering, Scanning probe microscopy, Phase shifts, Absorption

PROCEEDINGS ARTICLE | March 25, 2005
Proc. SPIE. 5729, Optoelectronic Integrated Circuits VII
KEYWORDS: Oxides, Resonators, Waveguides, Ions, Silicon, Oxygen, Scanning electron microscopy, Photomasks, Integrated optics, Nanophotonics

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top