Surface parameters are the properties to describe the shape characters of aspheric surface, which mainly include vertex radius of curvature (VROC) and conic constant (CC). The VROC affects the basic properties, such as focal length of an aspheric surface, while the CC is the basis of classification for aspheric surface. The deviations of the two parameters are defined as surface parameter error (SPE). Precisely measuring SPE is critical for manufacturing and aligning aspheric surface. Generally, SPE of aspheric surface is measured directly by curvature fitting on the absolute profile measurement data from contact or non-contact testing. And most interferometry-based methods adopt null compensators or null computer-generated holograms to measure SPE. To our knowledge, there is no effective way to measure SPE of highorder aspheric surface with non-null interferometry. In this paper, based on the theory of slope asphericity and the best compensation distance (BCD) established in our previous work, we propose a SPE measurement method for high-order aspheric surface in partial compensation interferometry (PCI) system. In the procedure, firstly, we establish the system of two element equations by utilizing the SPE-caused BCD change and surface shape change. Then, we can simultaneously obtain the VROC error and CC error in PCI system by solving the equations. Simulations are made to verify the method, and the results show a high relative accuracy.
With no necessity of compensating the whole aberration introduced by the aspheric surfaces, non-null test has the advantage over null test in applicability. However, retrace error, which is brought by the path difference between the rays reflected from the surface under test (SUT) and the incident rays, is introduced into the measurement and makes up of the residual wavefront aberrations (RWAs) along with surface figure error (SFE), misalignment error and other influences. Being difficult to separate from RWAs, the misalignment error may remain after measurement and it is hard to identify whether it is removed or not. It is a primary task to study the removal of misalignment error. A brief demonstration of digital Moiré interferometric technique is presented and a calibration method for misalignment error on the basis of reverse iteration optimization (RIO) algorithm in non-null test method is addressed. The proposed method operates mostly in the virtual system, and requires no accurate adjustment in the real interferometer, which is of significant advantage in reducing the errors brought by repeating complicated manual adjustment, furthermore improving the accuracy of the aspheric surface test. Simulation verification is done in this paper. The calibration accuracy of the position and attitude can achieve at least a magnitude of 10-5 mm and 0.0056×10-6rad, respectively. The simulation demonstrates that the influence of misalignment error can be precisely calculated and removed after calibration.
Aspheric optical components are an indispensable part of modern optics systems. With the development of aspheric optical elements fabrication technique, high-precision figure error test method of aspheric surfaces is a quite urgent issue now. We proposed a digital Moiré interferometer technique (DMIT) based on partial compensation principle for aspheric and freeform surface measurement. Different from traditional interferometer, DMIT consists of a real and a virtual interferometer. The virtual interferometer is simulated with Zemax software to perform phase-shifting and alignment. We can get the results by a series of calculation with the real interferogram and virtual interferograms generated by computer. DMIT requires a specific, reliable software system to ensure its normal work. Image acquisition and data processing are two important parts in this system. And it is also a challenge to realize the connection between the real and virtual interferometer. In this paper, we present a software system design for DMIT with friendly user interface and robust data processing features, enabling us to acquire the figure error of the measured asphere. We choose Visual C++ as the software development platform and control the ideal interferometer by using hybrid programming with Zemax. After image acquisition and data transmission, the system calls image processing algorithms written with Matlab to calculate the figure error of the measured asphere. We test the software system experimentally. In the experiment, we realize the measurement of an aspheric surface and prove the feasibility of the software system.
In the paper, a design scheme of driving circuit and collimating optical system used for 3D (three-dimensional) imaging device has been proposed. The driving circuit based on power MOSFET for high-power pulsed laser diode has the characteristics of short pulse-width and high output current. According to semiconductor laser’s far field divergence characteristic, the aspheric collimation part has been designed by using optical design software ZEMAX. Far field beam tracing and collimation results are simulated. The laser driver’s output current and pulse width are about 144A and 13.9ns respectively. The RMS of divergent angle of simulation in ZEMAX is 0.318mrad and the spot is more uniform.