Teresa Zoepfl
Ph.D. Student at Technische Univ München
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 19, 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Etching, Polymers, Crystals, Silicon, Interferometry, Computer simulations, Platinum, Plasma etching, Temperature metrology, Plasma

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