Dr. Tero Isotalo
Post-Doctoral Researcher at Tampere Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 March 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Plasmonics, Nanostructures, Electron beam lithography, MATLAB, Optical lithography, Etching, Glasses, Silicon, Scanning electron microscopy, Optoelectronics, Beam shaping, Chemical elements, Nanofabrication, Nanolithography

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