Mr. Teruhiko Nawata
at Tokuyama Corp
SPIE Involvement:
Author
Publications (10)

PROCEEDINGS ARTICLE | November 28, 2011
Proc. SPIE. 8190, Laser-Induced Damage in Optical Materials: 2011
KEYWORDS: Lithography, Magnesium fluoride, Quartz, Metals, Crystals, Laser irradiation, Transmittance, Vacuum ultraviolet, Color centers, Absorption

PROCEEDINGS ARTICLE | December 31, 2009
Proc. SPIE. 7504, Laser-Induced Damage in Optical Materials: 2009
KEYWORDS: Transparency, Magnesium fluoride, Crystals, Polarizers, Laser irradiation, Transmittance, Laser crystals, Vacuum ultraviolet, Crystal optics, Single crystal X-ray diffraction

PROCEEDINGS ARTICLE | May 18, 2009
Proc. SPIE. 7361, Damage to VUV, EUV, and X-Ray Optics II
KEYWORDS: Crystals, X-rays, Ions, Doping, Transmittance, Absorbance, Vacuum ultraviolet, Fluorine, Binary data, Absorption

PROCEEDINGS ARTICLE | March 16, 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Optical components, Birefringence, Annealing, Crystals, Calcium, Finite element methods, Nonlinear crystals, Stress analysis, Crystallography, Temperature metrology

PROCEEDINGS ARTICLE | March 7, 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Lithography, Refractive index, Transparency, Magnesium fluoride, Crystals, Transmittance, Immersion lithography, Laser crystals, Vacuum ultraviolet, Crystallography

PROCEEDINGS ARTICLE | March 27, 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Refractive index, Transparency, Scattering, Annealing, Crystals, Laser induced fluorescence, Transmittance, Excimer lasers, Immersion lithography, Vacuum ultraviolet

Showing 5 of 10 publications
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