Terumasa Kosaka
R & D Engineer
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 25 March 2019 Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Semiconductors, Lithography, Polymethylmethacrylate, Polymers, Metals, Scanning electron microscopy, Polymerization, Directed self assembly, Picosecond phenomena

Proceedings Article | 19 March 2018 Presentation
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Thin films, Lithography, Electron beam lithography, Data modeling, Image processing, Annealing, 3D modeling, Signal processing, Directed self assembly, Epitaxy

Proceedings Article | 27 March 2017 Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Semiconductors, Lithography, Optical lithography, Polymethylmethacrylate, Polymers, Polymerization, Directed self assembly, High volume manufacturing, Neodymium, Molecular self-assembly

Proceedings Article | 21 March 2016 Paper
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Lithography, Optical lithography, Polymers, X-rays, Silicon, Light scattering, Materials processing, Transmission electron microscopy, Polymerization, Directed self assembly, Scatter measurement, Nanolithography

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