Prof. Tetsu Kachi
Designated Professor at Nagoya Univ
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 5 March 2021 Presentation
Proc. SPIE. 11686, Gallium Nitride Materials and Devices XVI
KEYWORDS: Magnesium, Spectroscopy, Annealing, Ions, Nitrogen, Doping, Gallium nitride, Ion implantation, Aluminum nitride, Temperature metrology

Proceedings Article | 13 March 2019 Presentation
Proc. SPIE. 10918, Gallium Nitride Materials and Devices XIV
KEYWORDS: Annealing, Luminescence, Crystals, Nitrogen, Lamps, Surface roughness, Doping, Atomic force microscopy, Gallium nitride, Ion implantation

Proceedings Article | 13 March 2019 Presentation
Proc. SPIE. 10918, Gallium Nitride Materials and Devices XIV
KEYWORDS: Resistance, Gallium nitride, Field effect transistors, Silicon carbide, Molybdenum, Heterojunctions

Proceedings Article | 19 April 2017 Presentation
Proc. SPIE. 10104, Gallium Nitride Materials and Devices XII
KEYWORDS: Silica, Interfaces, Reliability, Gallium nitride, Field effect transistors, Current controlled current source

Proceedings Article | 27 March 2013 Paper
Proc. SPIE. 8625, Gallium Nitride Materials and Devices VIII
KEYWORDS: Switching, Silica, Dielectrics, Silicon, Reliability, Gallium nitride, Atomic layer deposition, Field effect transistors, Silicon carbide, Hybrid vehicles

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