Mr. Tetsu Kohyama
Manager at Nihon Entegris KK
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Lithography, Contamination, Metals, Ions, Photoresist materials, Adsorption, Semiconducting wafers

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Lithography, Polymers, Manufacturing, Semiconducting wafers, Chromatography, Yield improvement, Industrial chemicals

PROCEEDINGS ARTICLE | March 27, 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Potassium, Surface plasmons, Contamination, Iron, Polymers, Metals, Manufacturing, Process control, Adsorption, Chemical reactions

PROCEEDINGS ARTICLE | March 19, 2012
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Carbon, Polymers, Metals, Particles, Manufacturing, Photoresist materials, Adsorption, Sodium, Yield improvement, Liquids

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top