Tetsushi Tanaka
Marketing Manager at KELK Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 September 1995
Proc. SPIE. 2636, Microelectronic Device and Multilevel Interconnection Technology
KEYWORDS: Oxides, Silicon, Resistance, Doping, Field effect transistors, Picosecond phenomena, Semiconducting wafers, Cryogenics, CMOS devices, Wafer bonding

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