Prof. Tetsuya Goto
at Tohoku Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 4 March 2019
Proc. SPIE. 10906, Laser-based Micro- and Nanoprocessing XIII
KEYWORDS: Amorphous silicon, Thin films, Electrodes, Silicon, Coating, Doping, Transistors, Excimer lasers, Phosphorus, Pulsed laser operation

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