Dr. Thanh Hung Dinh
at QST
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 4 March 2019
Proc. SPIE. 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV
KEYWORDS: Optical filters, Mirrors, Beam splitters, Polarization, X-rays, CCD cameras, Laser ablation, X-ray lasers, Zirconium, Spherical lenses

Proceedings Article | 9 July 2015
Proc. SPIE. 9658, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII
KEYWORDS: Opacity, Ions, Numerical simulations, Extreme ultraviolet, Optical simulations, Picosecond phenomena, Pulsed laser operation, Tellurium, Plasma, Tin

Proceedings Article | 9 July 2015
Proc. SPIE. 9658, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII
KEYWORDS: Metrology, Laser energy, Nd:YAG lasers, Inspection, Photomasks, Extreme ultraviolet, Picosecond phenomena, Pulsed laser operation, Plasma, Tin

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