Dr. Thanh-Hung Dinh Profile

Dr. Thanh-Hung Dinh

at QST

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Author

Publications (6)

Proceedings Article | 1 May 2023 Poster + Paper

Study on irradiation effects by femtosecond-pulsed extreme ultraviolet in resist materials

Yuji Hosaka, Hiroki Yamamoto, Masahiko Ishino, Thanh-Hung Dinh, Masaharu Nishikino, Akira Kon, Shigeki Owada, Yuichi Inubushi, Yuya Kubota, Yasunari Maekawa

Proceedings Volume 12498, 1249827 (2023) https://doi.org/10.1117/12.2670220

KEYWORDS: Polymethylmethacrylate, Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, Attenuation, Free electron lasers, Film thickness, X-ray lasers, Zirconium, X-rays

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Proceedings Article | 8 July 2021 Open Access

Short pulse soft x-ray laser ablation research

Masahiko Ishino, Thanh-Hung Dinh, Katsuhiro Mikami, Noboru Hasegawa, Masaharu Nishikino

Proceedings Volume 11886, 118860R (2021) https://doi.org/10.1117/12.2591909

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Proceedings Article | 11 September 2020 Presentation

Pulse width dependence of laser-induced damage thresholds on silica glasses by soft X-ray lasers

Katsuhiro Mikami, Masahiko Ishino, Thanh-Hung Dinh, Shinji Motokoshi, Noboru Hasegawa, Akira Kon, Yuichi Inubushi, Shigeki Owada, Hiroo Kinoshita, Masaharu Nishikino

Proceedings Volume 11514, 115141E (2020) https://doi.org/10.1117/12.2570991

KEYWORDS: Silica, Glasses, X-ray lasers, Laser induced damage, X-rays, Laser damage threshold, Femtosecond phenomena, Dielectrics, High power lasers, Laser systems engineering

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Proceedings Article | 4 March 2019 Paper

Development of soft x-ray laser irradiation beamline for ablation and damage study

Masahiko Ishino, Thanh-Hung Dinh, Noboru Hasegawa, Kazuyuki Sakaue, Takeshi Higashiguchi, Satoshi Ichimaru, Masatoshi Hatayama, Masakazu Washio, Masaharu Nishikino

Proceedings Volume 10905, 109051C (2019) https://doi.org/10.1117/12.2513390

KEYWORDS: Laser ablation, Mirrors, Beam splitters, Zirconium, X-rays, Optical filters, CCD cameras, X-ray lasers, Spherical lenses, Polarization

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Proceedings Article | 9 July 2015 Paper

Experimental observation of laser-produced Sn extreme ultraviolet source diameter for high-brightness source

Goki Arai, Hiroyuki Hara, Thanh-Hung Dinh, Atsushi Sunahara, Takeshi Higashiguchi

Proceedings Volume 9658, 96581A (2015) https://doi.org/10.1117/12.2192188

KEYWORDS: Extreme ultraviolet, Laser energy, Plasma, Tin, Pulsed laser operation, Picosecond phenomena, Metrology, Photomasks, Inspection, Nd:YAG lasers

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Proceedings Article | 9 July 2015 Paper

Evaluation of a dot target based high-brightness microplasma extreme ultraviolet (EUV) source by hydrodynamic simulation

Hiroyuki Hara, Goki Arai, Thanh-Hung Dinh, Atsushi Sunahara, Takeshi Higashiguchi

Proceedings Volume 9658, 96581B (2015) https://doi.org/10.1117/12.2192194

KEYWORDS: Extreme ultraviolet, Plasma, Pulsed laser operation, Tin, Ions, Picosecond phenomena, Tellurium, Opacity, Optical simulations, Numerical simulations

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Showing 5 of 6 publications

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