Mr. Thanis M. Tridhavee
Student at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Apodization, Optical filters, Photoresist materials, Image quality, Image filtering, Photomasks, Polarization control, Nonlinear filtering, Filtering (signal processing)

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