Dr. Theodore M. Bloomstein
Staff Member at MIT Lincoln Lab
SPIE Involvement:
Publications (20)

Proceedings Article | 5 November 2005 Paper
Proceedings Volume 5992, 599218 (2005) https://doi.org/10.1117/12.632372
KEYWORDS: Photomasks, Diffraction, Polarization, Pellicles, Chromium, Optical proximity correction, Binary data, Reticles, 3D modeling, Diffraction gratings

Proceedings Article | 12 May 2005 Paper
Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.602585
KEYWORDS: Lithography, Lens design, Semiconducting wafers, Photomasks, Liquids, Microfluidics, Actuators, Microfluidic imaging, Sensors, Immersion lithography

Proceedings Article | 12 May 2005 Paper
Marylyn Bennett, Andrew Grenville, Scott Hector, Shane Palmer, Leonardus Leunissen, Vicky Philipsen, Theodore Bloomstein, Dennis Hardy, Mordechai Rothschild, James Hilfiker
Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.600098
KEYWORDS: Photomasks, Diffraction, Sensors, Polarization, Binary data, Diffraction gratings, Phase shifts, Polarizers, Laser beam diagnostics, Attenuators

Proceedings Article | 28 May 2004 Paper
Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.534194
KEYWORDS: Liquids, Scattering, Immersion lithography, Rayleigh scattering, Interfaces, Water, Scatter measurement, Raman scattering, Semiconducting wafers, Lithography

Proceedings Article | 28 May 2004 Paper
Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.534190
KEYWORDS: Thin films, Surface roughness, Thin film coatings, Atomic force microscopy, Optical coatings, Spectroscopic ellipsometry, Data modeling, Ellipsometry, Fluorine, X-rays

Showing 5 of 20 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top