Dr. Theodore M. Bloomstein
Staff Member at MIT Lincoln Lab
SPIE Involvement:
Author
Publications (20)

Proceedings Article | 5 November 2005 Paper
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Diffraction, Reticles, Polarization, Chromium, 3D modeling, Pellicles, Photomasks, Optical proximity correction, Binary data, Diffraction gratings

Proceedings Article | 12 May 2005 Paper
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Diffraction, Polarization, Sensors, Polarizers, Attenuators, Photomasks, Laser beam diagnostics, Binary data, Phase shifts, Diffraction gratings

Proceedings Article | 12 May 2005 Paper
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Actuators, Lithography, Microfluidics, Sensors, Lens design, Microfluidic imaging, Photomasks, Immersion lithography, Semiconducting wafers, Liquids

Proceedings Article | 28 May 2004 Paper
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Scattering, Water, Interfaces, Rayleigh scattering, Raman scattering, Immersion lithography, Semiconducting wafers, Scatter measurement, Liquids

Proceedings Article | 28 May 2004 Paper
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Thin films, Ellipsometry, Data modeling, X-rays, Optical coatings, Surface roughness, Atomic force microscopy, Spectroscopic ellipsometry, Thin film coatings, Fluorine

Showing 5 of 20 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top