Dr. Theodore Cacouris
Product Marketing Director at Cymer LLC
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 21 March 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Semiconductors, Carbon, Light sources, Deep ultraviolet, Metals, Nitrogen, Helium, Neon, Semiconducting wafers

Proceedings Article | 20 March 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Light sources, Logic, Optical lithography, Deep ultraviolet, 3D metrology, Photomasks, Immersion lithography

Proceedings Article | 30 March 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Light sources, Optical lithography, Data modeling, Deep ultraviolet, Scanners, Process control, Photomasks, Excimer lasers, Beam shaping, Immersion lithography, Optical proximity correction, Critical dimension metrology

Proceedings Article | 15 March 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Light sources, Scanners, Error analysis, Ions, Gases, Manufacturing, Laser scanners, Excimer lasers, 3D scanning, Neodymium, Molybdenum, Data analysis

Proceedings Article | 15 March 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Semiconductors, Lithography, Light sources, Deep ultraviolet, Excimer lasers, Excimers, Neon, Chemical elements, Molybdenum, Fluorine, Halogens

Showing 5 of 12 publications
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