Ted A. Prescop
Sr. Director, Technology Applications at Multibeam Corp
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Publications (7)

Proceedings Article | 26 March 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Electron beam lithography, Point spread functions, Electron beams, Polymethylmethacrylate, Scattering, Silicon, Monte Carlo methods, Image quality, Software development, Critical dimension metrology

Proceedings Article | 5 April 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Defect detection, Sensors, Data storage, Scanners, Inspection, Magnetism, Scanning electron microscopy, Wafer inspection, Semiconducting wafers, Defect inspection

Proceedings Article | 21 March 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Optical lithography, Polymethylmethacrylate, Etching, Scanners, Beam shaping, Optical alignment, Semiconducting wafers

Proceedings Article | 21 March 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Chromatic aberrations, Electron beam lithography, Diffraction, Monochromatic aberrations, Electron beams, Electrodes, Image resolution, Colorimetry, Semiconducting wafers, Beam analyzers

Proceedings Article | 4 April 2011
Proc. SPIE. 7970, Alternative Lithographic Technologies III
KEYWORDS: Chromatic aberrations, Electron beam lithography, Electron beams, Scattering, Laser scattering, Monte Carlo methods, Thermal effects, Electron beam direct write lithography, Spherical lenses, Semiconducting wafers

Showing 5 of 7 publications
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