Dr. Theodoros Manouras
Research Associate at Institute of Electronic Structure and Laser
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 19 March 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Polymers, Etching, Resistance, Photoresist materials, Extreme ultraviolet lithography, Lithography, Extreme ultraviolet, Polymer thin films, Thin films, Oxygen

Proceedings Article | 22 March 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Laser ablation, Lithography, Polymers, Multiphoton lithography, Optical lithography, Nickel, Continuous wave operation, Laser development, Multiphoton processes, Laser processing, Polymer thin films, Thin films, Molecules, Semiconductor lasers

Proceedings Article | 21 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Electron beam lithography, Photoresist materials, Polymers, Lithography, Extreme ultraviolet, Etching, Resistance, Polymer thin films, Extreme ultraviolet lithography, Thin films, Line edge roughness

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