Thilo Schmidt
at Univ Siegen
SPIE Involvement:
Author
Publications (12)

PROCEEDINGS ARTICLE | February 15, 2011
Proc. SPIE. 7926, Micromachining and Microfabrication Process Technology XVI
KEYWORDS: Microelectromechanical systems, Data modeling, Manufacturing, 3D modeling, Data acquisition, Computer aided design, Product engineering, Excel, Prototyping, Instrument modeling

PROCEEDINGS ARTICLE | March 31, 2010
Proc. SPIE. 7646, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2010
KEYWORDS: Microelectromechanical systems, Manufacturing, 3D modeling, Software development, Computer aided design, Product engineering, Process engineering, Instrument modeling, Virtual colonoscopy, Molecular nanotechnology

PROCEEDINGS ARTICLE | August 21, 2009
Proc. SPIE. 7402, Nanoengineering: Fabrication, Properties, Optics, and Devices VI
KEYWORDS: Fabrication, Microelectromechanical systems, Custom fabrication, Manufacturing, Control systems, Data processing, CMOS technology, Product engineering, Process engineering, Molecular nanotechnology

PROCEEDINGS ARTICLE | December 30, 2008
Proc. SPIE. 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
KEYWORDS: Microelectromechanical systems, Custom fabrication, Data modeling, Interfaces, Manufacturing, Data processing, Computer aided design, Product engineering, Process engineering, Environmental management

PROCEEDINGS ARTICLE | March 7, 2007
Proc. SPIE. 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
KEYWORDS: Microelectromechanical systems, Thin films, Etching, Materials processing, Manufacturing, 3D modeling, Data processing, Virtual reality, Prototyping, Device simulation

PROCEEDINGS ARTICLE | December 20, 2006
Proc. SPIE. 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
KEYWORDS: Microelectromechanical systems, Materials processing, Manufacturing, 3D modeling, Microelectronics, Photomasks, TCAD, Prototyping, Process modeling, Device simulation

Showing 5 of 12 publications
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