Thomas J. Becker
at Raytheon Co
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 20, 2003
Proc. SPIE. 4983, MOEMS and Miniaturized Systems III
KEYWORDS: Microelectromechanical systems, Actuators, Mirrors, Electronics, Etching, Electrodes, Metals, Control systems, Photoresist materials, Aluminum

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