Dr. Thomas Bibby Profile

Dr. Thomas Bibby

Staff Systems Engineer

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Publications (3)

Proceedings Article | 18 March 2015 Paper

New ArF immersion light source introduces technologies for high-volume 14nm manufacturing and beyond

T. Cacouris, W. Conley, J. Thornes, T. Bibby, J. Melchior, T. Aggarwal, E. Gross

Proceedings Volume 9426, 942618 (2015) https://doi.org/10.1117/12.2085968

KEYWORDS: Light sources, Helium, Lithography, Optical lithography, Deep ultraviolet, Critical dimension metrology, Control systems, Manufacturing, Molybdenum, Semiconductors

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Proceedings Article | 31 March 2014 Paper

Flexible power 90W to 120W ArF immersion light source for future semiconductor lithography

R. Burdt, J. Thornes, T. Duffey, T. Bibby, R. Rokitski, E. Mason, J. Melchior, T. Aggarwal, D. Haran, J. Wang, G. Rechtsteiner, M. Haviland, D. Brown

Proceedings Volume 9052, 90522K (2014) https://doi.org/10.1117/12.2048082

KEYWORDS: Light sources, Semiconducting wafers, Lithography, Semiconductors, Scanners, Light, Optical amplifiers, Switching, Optical lithography, Near field optics

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Proceedings Article | 1 May 1990 Paper

Coherent cw operation of 2-D grating surface-emitting diode laser arrays

Michael Lurie, Gary Evans, Nils Carlson, David Bour, Robert Amantea, Jacob Hammer, Thomas Bibby, Dean Gilbert, So Liew

Proceedings Volume 1219, (1990) https://doi.org/10.1117/12.18260

KEYWORDS: Laser applications, Continuous wave operation, Semiconductor lasers, Temperature metrology, Visibility, Laser stabilization, Copper, Gallium arsenide, Quantum wells

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