Dr. Thomas Buck
at Robert Bosch GmbH
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 16, 2003
Proc. SPIE. 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
KEYWORDS: Microelectromechanical systems, Semiconductors, Switches, Oscillators, Waveguides, Silicon, Diodes, Bridges, K band, Phase shifts

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