Dr. Thomas J. Bzik
Research Associate at Air Products and Chemicals Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 May 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Statistical analysis, Data modeling, Error analysis, Reliability, Distance measurement, Line width roughness, Chemical analysis, Semiconducting wafers, Statistical modeling, Arsenic

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top