Thomas Doerge
at Fraunhofer-IBMT
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 20, 2009
Proc. SPIE. 7365, Bioengineered and Bioinspired Systems IV
KEYWORDS: Nerve, Tissues, Etching, Electrodes, Silicon, Oxygen, Reactive ion etching, Semiconducting wafers, Standards development, Double sided flex circuits

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