CONFERENCE PROCEEDINGS
Advanced Search
Thomas Farinha
at Univ of Maryland College Park
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 10 March 2020 Presentation
Structural and electrical properties of MgO on GaN by thermal atomic layer deposition (Conference Presentation)
Proceedings Volume 11281, 112811R (2020) https://doi.org/10.1117/12.2548753
KEYWORDS: Gallium nitride, Atomic layer deposition, Oxides, Dielectrics, Thin films, Crystals, Semiconductors, Magnesium, Molecular beam epitaxy, Semiconducting wafers
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top