Dr. Thomas Foltyn
at Fraunhofer IWS Dresden
SPIE Involvement:
Author
Publications (10)

PROCEEDINGS ARTICLE | January 23, 2006
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Gold, Mirrors, Dielectrics, Silver, Optical coatings, Reflectivity, Microopto electromechanical systems, Micromirrors, Aluminum, Laser damage threshold

PROCEEDINGS ARTICLE | October 5, 2005
Proc. SPIE. 5963, Advances in Optical Thin Films II
KEYWORDS: Mirrors, Multilayers, Annealing, Interfaces, Silicon, Reflectivity, Heat treatments, Extreme ultraviolet, Molybdenum, Temperature metrology

PROCEEDINGS ARTICLE | October 5, 2005
Proc. SPIE. 5963, Advances in Optical Thin Films II
KEYWORDS: Mirrors, Dielectrics, Silver, Optical coatings, Reflectivity, Micromirrors, Aluminum, Laser damage threshold, Thin film coatings, Radium

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5721, MOEMS Display and Imaging Systems III
KEYWORDS: Mirrors, Multilayers, Deep ultraviolet, Silicon, Coating, Reflectivity, Spatial light modulators, Micromirrors, Aluminum, Vacuum ultraviolet

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5721, MOEMS Display and Imaging Systems III
KEYWORDS: Near infrared, Mirrors, Multilayers, Dielectrics, Silver, Optical coatings, Reflectivity, Microopto electromechanical systems, Aluminum, Absorption

PROCEEDINGS ARTICLE | October 18, 2004
Proc. SPIE. 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II
KEYWORDS: Mirrors, X-rays, Copper, Reflectivity, Objectives, Extreme ultraviolet, X-ray lasers, Molybdenum, X-ray lithography, X-ray technology

Showing 5 of 10 publications
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