Dr. Thomas Fries Profile

Dr. Thomas Fries

CEO & Founder at FRT Fries Research & Technology GmbH

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Publications (4)

Proceedings Article | 21 June 2015 Paper

Problems in thin film thickness measurement resolved: improvements of the fast Fourier transform analysis and consideration of the numerical aperture of microscope headers and collimators

M. Quinten, F. Houta, T. Fries

Proceedings Volume 9526, 95260R (2015) https://doi.org/10.1117/12.2184684

KEYWORDS: Reflectivity, Thin films, Microscopes, Refractive index, Head, Polarization, Fourier transforms, Silicon, Silica, Collimators

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Proceedings Article | 20 October 2005 Paper

A new optical metrology tool for measuring aspheres

Gerd Jakob, Thomas Fries, Matthias Meyer

Proceedings Volume 5965, 59651Z (2005) https://doi.org/10.1117/12.625534

KEYWORDS: Aspheric lenses, Metrology, Sensors, Head, Spherical lenses, Optical metrology, Optical spheres, Computer generated holography, Colorimetry, 3D metrology

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Proceedings Article | 20 October 2005 Paper

Development of a nanoscale linewidth-standard for high-resolution optical microscopy

R. Hild, R. Boucher, G. Kunath-Fandrei, E. Buhr, W. Mirandé, Th. Fries, W. Morgenroth, Uwe Huebner, Nadine Schwarz

Proceedings Volume 5965, 59651W (2005) https://doi.org/10.1117/12.625194

KEYWORDS: Quartz, Silicon, Ultraviolet radiation, Amorphous silicon, Calibration, Optical microscopy, Microscopy, Microscopes, Reflectivity, Atomic force microscopy

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Proceedings Article | 20 October 2005 Paper

A multi sensor metrology tool for nanometer to meter measurements

Thomas Fries

Proceedings Volume 5965, 596507 (2005) https://doi.org/10.1117/12.625531

KEYWORDS: Sensors, Atomic force microscopy, Metrology, Optical sensors, Colorimetry, 3D metrology, Nanotechnology, Lenses, Process control, Atomic force microscope

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