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Thomas Gerbo
Principal at Sears Gerbo Architecture
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 18 August 2005 Paper
Case Study: Sandia National Laboratories Center for Integrated Nanotechnologies (CINT)
Norm Toussaint, Tom Gerbo
Proceedings Volume 5933, 59330G (2005) https://doi.org/10.1117/12.617800
KEYWORDS: Buildings, Nanotechnology, Scientific research, Electron beam lithography, Humidity, Electromagnetic coupling, Control systems design, Research facilities, Contamination, Clean room processes
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