Thomas Gerbo
Principal at Sears Gerbo Architecture
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 18 August 2005
Proc. SPIE. 5933, Buildings for Nanoscale Research and Beyond
KEYWORDS: Nanotechnology, Electron beam lithography, Contamination, Buildings, Humidity, Scientific research, Electromagnetic coupling, Control systems design, Research facilities, Clean room processes

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