Thomas Herrmann
at GLOBALFOUNDRIES Dresden Module One LLC
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 March 2019 Presentation + Paper
Proceedings Volume 10962, 109620G (2019) https://doi.org/10.1117/12.2514769
KEYWORDS: Design for manufacturing, Analog electronics, Manufacturing, Chemical mechanical planarization, Design for manufacturability, Metals, Extremely high frequency, Yield improvement, Digital electronics, Transceivers

Proceedings Article | 30 March 2017 Paper
Tuhin Guha Neogi, Navneet Jain, Piyush Verma, David Permana, Andrey Lutich, Francois Weishbuch, Deepal Wehella-Gamage, Benoit Francois Claude Ramadout, Gowtham Vangara, Juhan Kim, Thomas Herrmann, Kai Sun, Katherina Babich, David Pritchard, Mahbub Rashed
Proceedings Volume 10148, 101480Z (2017) https://doi.org/10.1117/12.2258668
KEYWORDS: Monte Carlo methods, Diffusion, Statistical analysis, Lithography, Manufacturing, Diffractive optical elements, Optical lithography, Design for manufacturability, Silicon, Shape analysis

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