Thomas Herrmann
at GLOBALFOUNDRIES Dresden Module One LLC
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Transceivers, Extremely high frequency, Metals, Manufacturing, Design for manufacturing, Analog electronics, Digital electronics, Yield improvement, Chemical mechanical planarization, Design for manufacturability

Proceedings Article | 30 March 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Lithography, Optical lithography, Statistical analysis, Diffractive optical elements, Silicon, Diffusion, Manufacturing, Monte Carlo methods, Shape analysis, Design for manufacturability

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