Thomas Hirsiger
at Berner Fachhochschule Technik und Informatik
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 2 March 2020 Presentation + Paper
Proc. SPIE. 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV
KEYWORDS: Metals, Particles, Copper, Silicon, Materials processing, Surface roughness, Scanning electron microscopy, Picosecond phenomena, Photomicroscopy, Surface finishing

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