Dr. Thomas J. Huisman
SPIE Involvement:
Publications (7)

SPIE Journal Paper | 28 April 2023 Open Access
JM3, Vol. 22, Issue 03, 031208, (April 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031208
KEYWORDS: Scanning electron microscopy, Education and training, Semiconducting wafers, Electron microscopes, 3D scanning, Data modeling, Critical dimension metrology, Scatterometry, 3D metrology, 3D modeling

Proceedings Article | 27 April 2023 Poster + Presentation + Paper
Proceedings Volume 12496, 124961E (2023) https://doi.org/10.1117/12.2658094
KEYWORDS: Scanning electron microscopy, Line scan image sensors, Education and training, Simulations, Analytic models, Monte Carlo methods, Electron beams, Neural networks, Image analysis, Silicon

Proceedings Article | 5 March 2022 Paper
Proceedings Volume 12084, 120841I (2022) https://doi.org/10.1117/12.2622635
KEYWORDS: Data modeling, 3D modeling, Semiconducting wafers, Monte Carlo methods, Neural networks, Metrology, Semiconductors, Scanning electron microscopy, 3D metrology, Sensors

SPIE Journal Paper | 12 September 2020
Luc Van Kessel, Thomas Huisman, Cornelis Hagen
JM3, Vol. 19, Issue 03, 034002, (September 2020) https://doi.org/10.1117/12.10.1117/1.JMM.19.3.034002

Proceedings Article | 20 March 2020 Presentation + Paper
Proceedings Volume 11325, 113250Z (2020) https://doi.org/10.1117/12.2550240
KEYWORDS: Scanning electron microscopy, Line edge roughness, Monte Carlo methods, 3D modeling, Scattering, Electron beams, Metrology

Showing 5 of 7 publications
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