Dr. Thomas Kämpfe
at Univ Lyon
SPIE Involvement:
Author
Publications (16)

PROCEEDINGS ARTICLE | September 19, 2018
Proc. SPIE. 10775, 34th European Mask and Lithography Conference
KEYWORDS: Lithography, Plasmonics, Plasmons, Polarization, Metals, Numerical simulations, Photoresist materials, Photoresist developing, Nanolithography, Diffraction gratings

PROCEEDINGS ARTICLE | May 9, 2018
Proc. SPIE. 10680, Optical Sensing and Detection V
KEYWORDS: Lithium, 3D modeling, Projection systems

PROCEEDINGS ARTICLE | April 29, 2016
Proc. SPIE. 9898, Photonics for Solar Energy Systems VI
KEYWORDS: Reflectors, Refractive index, Multilayers, Optical lithography, Solar energy, Sputter deposition, Silicon, Nitrogen, Reflectivity, Receivers, Photoresist materials, Absorbance, Semiconducting wafers, Temperature metrology, Diffraction gratings, Absorption

SPIE Journal Paper | April 28, 2015
OE Vol. 54 Issue 04
KEYWORDS: Polarizers, Polarization, Gold, Metals, Photoresist materials, Photomasks, Lithography, Optical design, Dielectric polarization, Scanning electron microscopy

SPIE Journal Paper | October 8, 2014
OE Vol. 53 Issue 10
KEYWORDS: Polarization, Silicon, Microelectronics, Semiconducting wafers, Photomasks, Transformers, Prototyping, Manufacturing, Chemical elements, Amorphous silicon

PROCEEDINGS ARTICLE | May 2, 2014
Proc. SPIE. 9130, Micro-Optics 2014
KEYWORDS: Gold, Lithography, Optical design, Polarization, Metals, Polarizers, Photoresist materials, Photomasks, Dielectric polarization, Diffraction gratings

Showing 5 of 16 publications
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